Scanning microscope with brightness control

Details Scanning microscope with brightness control Scanning microscope with brightness control

2005-08-02

2005-08-02

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S304000, C250S307000

Reexamination Certificate

active

06924481

ABSTRACT:
Automatic pattern matching and shape measurement are enabled by adjusting a brightness level of a microscope image based on information of a local region of the image so that a magnified image of the local region takes on an appropriate brightness and is not affected by brighter peripheral portions of the image, thereby enabling feature extraction of a desired pattern. By using the inventive method in an energized beam apparatus having a sample stage capable of linear and tilting movement, a series of operations including cross section forming, sample tilting, cross section observation, and pattern recognition, may be performed on an automated basis.

REFERENCES:
patent: 5051585 (1991-09-01), Koshishiba et al.
patent: 6365897 (2002-04-01), Hamashima et al.
patent: 6479819 (2002-11-01), Hamashima et al.
patent: 6555816 (2003-04-01), Sawahata et al.

Affiliated with

Also associated with

Rating

Scanning microscope with brightness control does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning microscope with brightness control, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning microscope with brightness control will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3478511