Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-11-08
2005-11-08
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000
Reexamination Certificate
active
06963067
ABSTRACT:
The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.
REFERENCES:
patent: 4618766 (1986-10-01), van der Mast et al.
patent: 5512747 (1996-04-01), Maeda
patent: 6353222 (2002-03-01), Dotan
patent: 6538249 (2003-03-01), Takane et al.
patent: 6653633 (2003-11-01), Takane et al.
patent: 6838667 (2005-01-01), Tsuneta et al.
patent: 0566963 (1993-10-01), None
patent: 2001-84944 (2001-03-01), None
patent: 2001-118537 (2001-04-01), None
patent: 2001-344599 (2001-12-01), None
patent: 2002-75263 (2002-03-01), None
patent: 2002-184336 (2002-06-01), None
A. Muto et al., “Attempts to Improve SEM Image Quality by Special Imaging Feature.” Proceedings of the Fifty-Eighth Annual Meeting of the Japanese Society of Electron Microscopy, May 14-16, 2002, pp. 246. English Translation.
M. Sato et al., “Depth of the Field at High Magnifications of Scanning Electron Microscopes.” J. Vac. Sci. Technol. B 18(6), Nov./Dec. 2000, pp. 3047-3051.
T. Kogashiwa et al., “Automatic Adjustment Function of Optical Axis, and automatic Expansion Function of Focal Depth.” SCAN TECH 2002, Preliminary report, Sep. 2002, pp. 2-6. English Translation.
Norio Baba, “Three-dimensional Automatic Measurement by the Stereoscopic Observation Method.” SCAN TECH 2000, Preliminary Report, Sep. 2000, pp. 28-32. English Translation.
Nakagawa Mine
Nimura Kazutaka
Sato Mitsugu
Takane Atsushi
Takeuchi Shuichi
Dickstein , Shapiro, Morin & Oshinsky, LLP
Fernandez Kalimah
Hitachi High-Technologies Corporation
Hitachi Science Systems, Inc.
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