4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Kazutaka Nimura

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Method of forming a sample image and charged particle beam...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Method of forming a sample image and charged particle beam...

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate

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Scanning electron microscope and sample observing method...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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