Scanning electron microscope and method of processing the same

Details Scanning electron microscope and method of processing the same Scanning electron microscope and method of processing the same

1989-08-08

1991-03-19

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 250397, H01J 3729, H01J 3728

Patent

active

050013440

ABSTRACT:
An image generated by the detected signals of a scanning electron microscope is divided, for example, into a plurality of rectangular small areas with the boundaries parallel to the y-axis. The relative height in the boundary is obtained by conducting one dimensional integration for respectively boundaries. Thereafter, the relative height difference between the boundaries is determined by conducting one dimensional integration for each area in the direction perpendicular to the boundary. Thereby, the surface three dimensional topography having less distortion can be measured, even in case errors are included in the normal distribution which indicates the surface topography of the specimen, by adjusting and determining the height in the area by the interporating operation.

REFERENCES:
patent: 4588890 (1986-05-01), Finnes
patent: 4725730 (1988-02-01), Kato et al.
patent: 4818874 (1989-04-01), Ishikawa
patent: 4835385 (1989-05-01), Kato et al.
patent: 4912313 (1990-03-01), Kato et al.

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