Scanning electron microscope and image forming method therewith

Details Scanning electron microscope and image forming method therewith Scanning electron microscope and image forming method therewith

1994-10-28

1996-06-04

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, H01J 3728

Patent

active

055235670

ABSTRACT:
In an electron microscope for observing an image of a sample using secondary electrons emitted from the sample by two-dimensionally scanning an electron beam on the sample, a low magnification and wide view image of the sample is formed on one frame memory. The frame memory for storing on picture of the image is divided into an appropriate number of areas. The image data of the sample, obtained by consecutively moving the sample to the sample areas, is stored to the corresponding areas of the frame memory.

REFERENCES:
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patent: 4866273 (1989-09-01), Kobayashi et al.
patent: 5276325 (1994-01-01), Todokoro et al.
patent: 5367318 (1994-11-01), Beaudin et al.
Review of Scientific Instruments, vol. 62, No. 4, Apr. 1991, New York, US, pp. 970-981; Matsuyama et al.: A data acquisition and display system for spin-polarized scanning electron microscopy (spin SEM).

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