Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2009-02-25

2011-12-20

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S3960ML, C250S397000

Reexamination Certificate

active

08080790

ABSTRACT:
An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.

REFERENCES:
patent: 6107637 (2000-08-01), Watanabe et al.
patent: 6521891 (2003-02-01), Dotan et al.
patent: 6633034 (2003-10-01), Crewe
patent: 6946656 (2005-09-01), Ezumi et al.
patent: 2006/0011835 (2006-01-01), Murakoshi et al.
patent: 2007/0120065 (2007-05-01), Takane et al.
patent: 2008/0191135 (2008-08-01), Aoki et al.
patent: 2009/0261252 (2009-10-01), Hasegawa et al.
patent: 2010/0213370 (2010-08-01), Nakasuji et al.
patent: 11-149895 (1999-06-01), None
patent: 2001-236915 (2001-08-01), None
patent: 2005-276639 (2005-10-01), None
patent: 2005-338096 (2005-12-01), None
patent: 2007-141632 (2007-06-01), None

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