Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2009-02-25
2011-12-20
Kim, Robert (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S3960ML, C250S397000
Reexamination Certificate
active
08080790
ABSTRACT:
An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.
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Asao Kazunari
Ikegami Akira
Kazumi Hideyuki
Mizuno Takeshi
Ojima Yuki
Hitachi High-Technologies Corporation
Ippolito Rausch Nicole
Kim Robert
McDermott Will & Emery LLP
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