4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Hideyuki Kazumi

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LSI device etching method and apparatus thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Parallel-planar plasma processing apparatus

Communications: radio wave antennas – Antennas – Having electric space discharge device
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Plasma etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Plasma processing apparatus and method

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Profile ID: LFUS-PAI-P-507706

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