Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2005-12-27

2005-12-27

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S397000

Reexamination Certificate

active

06979821

ABSTRACT:
Image observation at high resolution is realized and irregularity information of a sample is obtained.The reflected electrons12aemitted in a direction at a small angle with the surface of the sample8are detected by the detectors10aand10barranged on the side of the electron source1of the magnetic field leakage type object lens7and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.

REFERENCES:
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patent: 5412209 (1995-05-01), Otaka et al.
patent: 5659172 (1997-08-01), Wagner et al.
patent: 5939720 (1999-08-01), Todokoro
patent: 6084238 (2000-07-01), Todokoro et al.
patent: 2003/0122074 (2003-07-01), Suzuki et al.
patent: 06-043885 (1994-06-01), None

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