Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

2011-08-02

2011-08-02

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S310000, C250S3960ML, C430S296000, C702S027000, C702S028000

Reexamination Certificate

active

07989768

ABSTRACT:
A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.

REFERENCES:
patent: 6521891 (2003-02-01), Dotan et al.
patent: 2002/0027440 (2002-03-01), Shinada et al.
patent: 2004/0113074 (2004-06-01), Suzuki et al.
patent: 2004/0124364 (2004-07-01), Sato et al.
patent: 2006/0011835 (2006-01-01), Murakoshi et al.
patent: 2007/0023658 (2007-02-01), Nozoe et al.
patent: 01-214769 (1989-08-01), None
patent: 07-288096 (1995-10-01), None

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