Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1996-04-05

1997-08-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3726

Patent

active

056591748

ABSTRACT:
A sample is scanned with a focused electron beam so that secondary particles characteristic of the sample are generated therefrom and the generated particles are detected by a detector so as to be converted into an electric signal. The electric signal is converted into digital image data, which are stored in a image memory. The stored image data are displayed on a display along with digital SEM operating picture data stored in a memory of a personal computer. An operating signal generated by an input device is conducted to not only the personal computer but also an input control unit, which converts the operating signal into a control signal. This control signal is used to change a parameter associated with the image data, i.e., for example, to control focusing of the electron beam.

REFERENCES:
patent: 5254857 (1993-10-01), Ross et al.
patent: 5359197 (1994-10-01), Komatsu et al.

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