4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Kaneo Kageyama

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Charged particle beam irradiation apparatus and irradiation...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged particle beam irradiation apparatus and irradiation...

Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate

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Charged particle beam scanning method and charged particle...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Profile ID: LFUS-PAI-P-1240288

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