Scanning electron beam microscope with high resolution at low ac

Details Scanning electron beam microscope with high resolution at low ac Scanning electron beam microscope with high resolution at low ac

1991-12-02

1993-08-31

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250396ML, H01J 3714

Patent

active

052411761

ABSTRACT:
An electron beam device having a single pole electromagnetic objective lens whose pole top face is positioned in front of a sample as viewed from the side of an electron beam source. A secondary electron detector is provided in the vicinity of the pole top face of an inner cylinder of the objective lens. The objective lens has a circular cylindrical or conical shape at the top of the objective lens and the vertical angle of the circular cylindrical or conical shape is 45.degree.-90.degree.. The working distance between the top of the objective lens and sample is less than 6 mm. It is possible to survey the sample with a resolving power corresponding to a dimension about one-half that of the prior art under low accelerating voltage conditions.

REFERENCES:
patent: 4306149 (1981-12-01), Le Poole et al.
patent: 4785176 (1988-11-01), Frosien et al.
patent: 4999496 (1991-03-01), Shaw et al.
patent: 5023457 (1991-06-01), Yonezawa
patent: 5045705 (1991-09-01), Mollenstedt
patent: 5079428 (1992-01-01), Da Lin et al.

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