4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Akira Yonezawa

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Charged particle beam apparatus and contamination removal...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Charged particle beam apparatus and contamination removal...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Circuit board

Metal working – Method of mechanical manufacture – Electrical device making
Patent

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Electromagnetic field superimposed lens and electron beam...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electron beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-325815

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