Sample transport system

Details Sample transport system Sample transport system

1981-07-30

1983-11-01

Reeves, Robert B.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414222, 414417, 414331, 118729, B65G 5102

Patent

active

044127715

ABSTRACT:
A sample transport system adaptable for use in an MBE instrument includes means for introducing a plurality of substrates into a storage chamber and means for conveying each substrate on a preselected basis to a processing chamber whereby the wafers not being processed are completely protected against contaminants which may occur within the processing chamber.

REFERENCES:
patent: 3516386 (1970-06-01), Landwear et al.
patent: 3584847 (1971-06-01), Hammond et al.
patent: 3585941 (1971-06-01), Primo
patent: 3902615 (1975-09-01), Levy et al.
patent: 3981791 (1976-09-01), Rosvold
patent: 4089735 (1978-05-01), Sussmann
patent: 4293249 (1982-03-01), Whelan
patent: 4318767 (1981-10-01), Hijikata et al.

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