4. Radiant energy
  5. Electron energy analysis

Robert L. Gerlach

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Angular aperture shaped beam system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Collection of secondary electrons through the objective lens...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Direct imaging monochromatic electron microscope

Radiant energy – Inspection of solids or liquids by charged particles
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Direct imaging monochromatic electron microscope

Radiant energy – Electron energy analysis
Patent

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Electron beam system using multiple electron beams

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-266513

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