Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2006-01-03
2006-01-03
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S305000, C250S306000
Reexamination Certificate
active
06982420
ABSTRACT:
Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
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Nagaoki Isao
Nakazawa Eiko
Dickstein , Shapiro, Morin & Oshinsky, LLP
Hitachi High-Technologies Corp.
Hitachi Science Systems Ltd.
Lee John R.
Quash Anthony
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