4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Hitachi High-Technologies Corp.

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Biomagnetic measurement apparatus

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Charged particle beam exposure apparatus, charged particle...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electron beam source and electron beam exposure apparatus...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Inspection system, inspection method, and process management...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Magnetic field measurement apparatus

Electricity: measuring and testing – Magnetic – Magnetometers
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Profile ID: LFUS-PAI-P-2904341

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