Sample mount for a scanning electron microscope

Details Sample mount for a scanning electron microscope Sample mount for a scanning electron microscope

2005-03-29

2005-03-29

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

Reexamination Certificate

active

06872957

ABSTRACT:
A sample mount and method is disclosed for securing a semiconductor wafer sample to a generic base of a scanning electron microscope. The mount has two opposing clamp members that move relative to one another in response to rotational input to a lead screw. By placing a sample between the clamp members and rotating the lead screw, the samples may be clamped for inspection. When inspection is complete, the lead screw may be rotated in the opposite direction to release the clamping hold on the sample. The clamp members are adjustable to hold varying thicknesses and numbers of specimens making up the sample. In one embodiment, both clamp members move symmetrically from a common origin. In yet another embodiment, one clamp member is fixed relative to the mount and the other clamp member moves relative thereto.

REFERENCES:
patent: 4349242 (1982-09-01), Ogura
patent: 4943148 (1990-07-01), Mondragon et al.
patent: 5033834 (1991-07-01), Corder et al.
patent: 5923040 (1999-07-01), Carroll
patent: 6184533 (2001-02-01), Shirai et al.
patent: 6414322 (2002-07-01), Carroll

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