Sample CD measurement system

Details Sample CD measurement system Sample CD measurement system

1999-05-24

2000-12-05

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

388372, 388393, G01B 1100

Patent

active

061574511

ABSTRACT:
A sample CD measurement system adapted for measuring the CD of a measurement portion accurately even in the case where the shape of the measurement portion and the direction of measurement are arbitrary. Before the CD measurement, a measurement reference image corresponding to the measurement portion is registered in a computer and controller. At the time of the CD measurement, the measurement reference image is read and compared with an image of the measurement portion to thereby obtain a difference in shape between the image of the measurement portion and the measurement reference image on the basis of a result of the comparison to thereby obtain the CD of the measurement portion on the basis of the difference in shape.

REFERENCES:
patent: 3736063 (1973-05-01), Ohno et al.

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