Rotating or rotatable compensator system providing aberation...

Details Rotating or rotatable compensator system providing aberation... Rotating or rotatable compensator system providing aberation...

2007-12-04

2007-12-04

Nguyen, Tu T. (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

11497920

ABSTRACT:
Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.

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