ROM device having memory units arranged in three dimensions, and

Details ROM device having memory units arranged in three dimensions, and ROM device having memory units arranged in three dimensions, and

1997-11-25

1999-01-12

Chaudhari, Chandra

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438270, H01L 218246

Patent

active

058588418

ABSTRACT:
A three-dimensional ROM device includes a silicon substrate having plurality of parallel trenches formed in an upper surface thereof, and a plurality of raised mesa regions. Each trench has a bottom and a pair of sidewalls, and is separated from an adjacent trench by a respective mesa region. A plurality of separated, parallel source/drain regions are provided, including a first and second source/drain region located on respective opposite sides of a respective trench bottom, and a third and fourth source/drain region located on respective opposite sides of a respective raised mesa region. Each source/drain region serves as a bit line. A gate oxide layer is located on the upper surface of the silicon substrate. A plurality of sidewall oxide layers are formed on selected sidewalls and serve as channel barriers. A plurality of silicon nitride layers are formed above selected mesa regions and trench bottoms, and serve as channel barriers. A plurality of gate layers are located over the gate oxide layer and the silicon nitride layers and serve as word lines. A region between any two adjacent source/drain regions comprises a channel region.

REFERENCES:
patent: 5021355 (1991-06-01), Dhong et al.
patent: 5504025 (1996-04-01), Fong-Chung et al.
patent: 5627091 (1997-05-01), Hong
patent: 5744393 (1998-04-01), Risch et al.

Affiliated with

Also associated with

Rating

ROM device having memory units arranged in three dimensions, and does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with ROM device having memory units arranged in three dimensions, and, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and ROM device having memory units arranged in three dimensions, and will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1515014