X-ray or gamma ray systems or devices – Specific application – Lithography
Patent
1987-01-14
1990-02-06
Church, Craig E.
X-ray or gamma ray systems or devices
Specific application
Lithography
378113, 378124, 378137, 378140, 378143, G21K 500
Patent
active
048993549
ABSTRACT:
Roentgen lithography aparatus comprises a roentgen tube for producing long wave roentgen radiation for forming an image of a mask on a substrate. The roentgen tube comprises an electron gun having a glow cathode and a grid, electron beam deflecting and focussing coils, a target on which the electron beam is projected and an exit window through which roentgen rays from the target are projected through a lithography mask onto a substrate. The glow cathode and the target are of high atomic number high melting point material, such as tunsten. The grip has an annular flange with a central opening in which the tip of the glow cathode is disposed. The front face of the flange facing the target is frustoconical with an included angle of about 100.degree. to 140.degree. while the rear face is plane. The angle between the front and rear faces as measured in a radial plane is about 15.degree. to 60.degree.. The focussing coil focusses the electron beam into a focal spot on the target having a diameter less than 10.sup.-4 m. The distance between the target and the exit window does not exceed 2.times.10.sup.-2 m and the distance between the target and the lithography mask does not exceed 2.times.10.sup.-1 m. The roentgen tube may be provided with a plurality of exit windows in which case the face of the target facing the cathode is dome or polyhedron shaped and the focussing and deflecting coils are controlled to focus the electron beam successively on different points on the target to project roentgen rays out through different windows.
REFERENCES:
patent: 2379397 (1945-06-01), Zunick
patent: 3158745 (1964-11-01), Stanhope
patent: 3178578 (1965-04-01), Gale
patent: 3743842 (1973-07-01), Smith et al.
patent: 3949228 (1976-04-01), Ryan
patent: 4007375 (1977-02-01), Albert
patent: 4048496 (1977-09-01), Albert
patent: 4153843 (1979-05-01), Pease
patent: 4159436 (1979-06-01), Ely
patent: 4182955 (1980-01-01), Davis
patent: 4392054 (1983-07-01), Sato et al.
patent: 4573186 (1986-02-01), Reinhold
Burns Robert E.
Church Craig E.
Feinfocus Rontgensysteme GmbH
Freeman John C.
Lobato Emmanuel J.
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