4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Feinfocus Rontgensysteme GmbH

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Fine focus X-ray tube and method of forming a microfocus of the

X-ray or gamma ray systems or devices – Source – Electron tube
Patent

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Roentgen lithography method and apparatus

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Profile ID: LFUS-PAI-P-673448

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