RF generating system with fast loop control

Details RF generating system with fast loop control RF generating system with fast loop control

2005-07-19

2005-07-19

Milord, Marceau (Department: 2682)

Telecommunications

Transmitter and receiver at separate stations

With control signal

C455S063100, C455S571000, C455S572000, C455S574000, C455S127100, C455S127500, C455S343600, C330S149000, C330S306000, C330S066000, C340S426250, C340S428000, C340S511000, C340S521000

Reexamination Certificate

active

06920312

ABSTRACT:
An RF generating system operates with high efficiency to supply RF output power to a plasma load. The RF generating system is capable of modulating the RF output power at frequencies up to the frequency of the RF output power while maintaining high efficiency operation. Broadband frequency modulation of the RF output power suppresses instabilities thereby minimizing unstable behavior of the plasma load.

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