Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate
2005-05-31
2005-05-31
McDonald, Rodney G. (Department: 1753)
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
C204S298020, C118S715000, C118S720000, C118S721000, C118S729000, C156S345300, C156S345430
Reexamination Certificate
active
06899798
ABSTRACT:
Disclosed herein is a method of roughening a ceramic surface by forming mechanical interlocks in the ceramic surface by a chemical etching process, a thermal etching process, or a laser micromachining process. Also disclosed herein are components for use in semiconductor processing chambers (in particular, a deposition ring for use in a PVD chamber) which have at least one ceramic surface having mechanical interlocks formed therein by chemical etching, thermal etching, or laser micromachining. Ceramic surfaces which have been roughened according to the chemical etching, thermal etching, or laser micromachining process of the invention are less brittle and damaged than ceramic surfaces which are roughened using conventional grit blasting techniques. The method of the invention results in a roughened ceramic surface which provides good adherence to an overlying sacrificial layer (such as aluminum).
REFERENCES:
patent: 4822633 (1989-04-01), Inoue
patent: 5558789 (1996-09-01), Singh
patent: 5703341 (1997-12-01), Lowndes et al.
patent: 5897752 (1999-04-01), Hong et al.
patent: 6620520 (2003-09-01), O'Donnell et al.
patent: 4235333 (1994-03-01), None
patent: 06024878 (1994-02-01), None
C. I. Helgesson, Ceramic-to-Metal Bonding, Boston Technical Publishers: Cambridge, MA, pp. 7-21 (1908).
He Yongxiang
Stow Clifford C.
Wang Hong
Weldon Edwin Charles
Applied Materials Inc.
Church Shirley L.
McDonald Rodney G.
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