Reticle-masking objective with aspherical lenses

Details Reticle-masking objective with aspherical lenses Reticle-masking objective with aspherical lenses

2008-05-13

2008-05-13

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S656000

Reexamination Certificate

active

07372634

ABSTRACT:
A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.

REFERENCES:
patent: 4717242 (1988-01-01), Echizen et al.
patent: 4906080 (1990-03-01), Omata
patent: 5555479 (1996-09-01), Nakagiri et al.
patent: 5646715 (1997-07-01), Wangler et al.
patent: 5742436 (1998-04-01), Furter
patent: 5856884 (1999-01-01), Mercado
patent: 5982558 (1999-11-01), Furter et al.
patent: 6366410 (2002-04-01), Schultz et al.
patent: 6597511 (2003-07-01), Wangler et al.
patent: 6680803 (2004-01-01), Schultz et al.
patent: 2002/0039175 (2002-04-01), Shafer et al.
patent: 2002/0196533 (2002-12-01), Shafer et al.
patent: 2004/0070742 (2004-04-01), Suenaga
patent: 292 727 (1991-08-01), None
patent: 94 09 744.5 (1994-10-01), None
patent: 44 41 947 (1996-05-01), None
patent: 195 48 805 (1997-07-01), None
patent: 196 53 983 (1998-06-01), None
patent: 199 42 281 (2000-11-01), None
patent: 0526242 (1993-02-01), None
patent: 0 564 264 (1993-03-01), None
patent: 0 811 865 (1997-12-01), None
patent: 1 316 832 (2003-06-01), None
patent: 95/32446 (1995-11-01), None
N. Nomura et al.; “ArF Quarter-Micron Projection Lithography With an Aspherical Lens System”; Microelectronic Engineering, Apr. 1990, vol. 11; pp. 183-186.

Affiliated with

Also associated with

Rating

Reticle-masking objective with aspherical lenses does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reticle-masking objective with aspherical lenses, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reticle-masking objective with aspherical lenses will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2807970