Retaining ring with flange for chemical mechanical polishing

Details Retaining ring with flange for chemical mechanical polishing Retaining ring with flange for chemical mechanical polishing

2006-08-22

2006-08-22

Eley, Timothy V. (Department: 3724)

Abrading

Accessory

C451S288000, C451S398000

Reexamination Certificate

active

07094139

ABSTRACT:
A retaining ring has a generally annular body with a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface. The outer diameter surface includes an outwardly projecting flange having a lower surface, and the bottom surface includes a plurality of channels.

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