Resonator electrode shields

Details Resonator electrode shields Resonator electrode shields

2008-03-24

2010-10-05

Chang, Joseph (Department: 2817)

Oscillators

Electromechanical resonator

With optical, piezoelectric or acoustic coupling means

C331S154000, C331S156000, C333S186000, C333S197000

Reexamination Certificate

active

07808332

ABSTRACT:
One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.

REFERENCES:
patent: 6985051 (2006-01-01), Nguyen et al.
patent: 7119636 (2006-10-01), Nguyen et al.
patent: 7583168 (2009-09-01), Kawai et al.
patent: 2004/0113722 (2004-06-01), Bircumshaw et al.

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