4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Angular rate using gyroscopic or coriolis effect

Thor Juneau

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Low-resistivity microelectromechanical structures with...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Method of fabricating a sensor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Micro-machined accelerometer with improved transfer...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micromachined vibratory rate gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Parallel plate electrostatic actuation of MEMS mirrors

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1736738

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