Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
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Anchors for microelectromechanical systems having an SOI...
Anchors for microelectromechanical systems having an SOI...
Anchors for microelectromechanical systems having an SOI...
Anti-stiction technique for electromechanical systems and...
Anti-stiction technique for electromechanical systems and...
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