Resonator arrangement for bandwidth control

Details Resonator arrangement for bandwidth control Resonator arrangement for bandwidth control

2005-02-15

2005-02-15

Wong, Don (Department: 2821)

Coherent light generators

Particular active media

Gas

C372S055000

Reexamination Certificate

active

06856638

ABSTRACT:
A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, a resonator including a pair of resonator reflecting surfaces disposed on either side of the discharge chamber for generating a laser beam, and a line-narrowing/selection unit within the resonator for narrowing the bandwidth of the laser beam. The resonator further includes a third reflecting surface which is deformable and disposed between the pair of resonator reflecting surfaces. The line-narrowing/selection unit preferably includes a beam expander and a dispersive element, wherein the deformable third reflecting surface is disposed between the beam expander and the dispersive element.

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patent: 40 29 687 (1990-09-01), None
B. Rückle et al., “Tuning ranges of an injection-locked excimer laser,”Optics and Laser Technology, vol. 19, No. 3, Jun. 1987, pp. 153-157.

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