4. Coherent light generators
  5. Particular beam control device
  6. Optical output stabilization

Peter Lokai

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Absolute wavelength calibration of lithography laser using...

Optics: measuring and testing – By light interference – Having partially reflecting plates in series
Reexamination Certificate

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Absolute wavelength calibration of lithography laser using...

Coherent light generators – Particular beam control device – Optical output stabilization
Reexamination Certificate

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Laser arrangement for generating narrow-band, tunable coherent r

Optical: systems and elements – Optical frequency converter – Parametric oscillator
Patent

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Method and apparatus for reduction of spectral fluctuations

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Method and apparatus for stabilizing the frequency of a laser be

Coherent light generators – Particular beam control device – Optical output stabilization
Patent

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Profile ID: LFUS-PAI-P-337773

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