Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1998-05-01
2000-12-26
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, 250311, G01N 128, H01J 3726
Patent
active
061663808
ABSTRACT:
An electron microscope resolving power evaluation method for evaluating performance of a scanning electron microscope without resorting to visual sensory analysis for minimizing a difference in deterioration with age and in performance among individual scanning electron microscopes. A specimen is prepared by overlaying materials having different emission coefficients of secondary charged particles such as secondary electrons, backscattered electrons, transmitted electrons, etc., a cross-section including an overlaid material part of thin-film layers having known dimensions is mirror-finished, data of a scanning electron microscopical image of the cross-section, including the overlaid material part is obtained, and then the resolving power performance of the scanning electron microscope is evaluated quantitatively by means of frequency analysis, etc.
REFERENCES:
patent: 5555319 (1996-09-01), Tsubusaki et al.
patent: 5945833 (1999-08-01), Mil'shtein et al.
Horiuchi Tatsuo
Kawame Keisuke
Kitagawa Taiji
Ninomiya Takanori
Sato Mitsugu
Anderson Bruce C.
Hitachi , Ltd.
Wells Nikita
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