Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1986-02-10
1987-06-23
Kittle, John E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430326, 430327, 430330, 156643, 4272556, 427 82, G03C 500, C23C 1600, B05D 512
Patent
active
046752730
ABSTRACT:
A method for applying a polymeric resist coating of very high molecular weight to a suitable substrate without the necessity of elaborate purification steps and for ensuring adequate coverage of raised regions in three-dimensionally patterned substrates. The method comprises exposing the substrate to be coated to the vapor of an anionically polymerizable monomer of the formula:
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Rooney John M.
Woods John G.
Kittle John E.
Loctite (Ireland) Limited
Ryan Patrick J.
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