Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2006-04-11
2008-08-05
Lee, Calvin (Department: 2892)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C257S022000
Reexamination Certificate
active
07407858
ABSTRACT:
A method of fabricating a RRAM includes preparing a substrate and forming a bottom electrode ori the substrate. A PCMO layer is deposited on the bottom electrode using MOCVD or liquid MOCVD, followed by a post-annealing process. The deposited PCMO thin film has a crystallized PCMO structure or a nano-size and amorphous PCMO structure. A top electrode is formed on the PCMO layer.
REFERENCES:
patent: 6927120 (2005-08-01), Hsu et al.
patent: 6972239 (2005-12-01), Li et al.
patent: 7098101 (2006-08-01), Li et al.
Evans David R.
Hsu Sheng Teng
Li Tingkai
Lee Calvin
Ripma David C.
Sharp Laboratories of America Inc.
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