Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1992-04-24
1993-11-23
Kight, III, John
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
378 35, 427160, 427258, 427259, 430270, 430967, G03C 502
Patent
active
052643280
ABSTRACT:
The present invention provides a method for determining the development endpoint in a X-ray lithographic process. Endpoint is determined by visually observing resist test field patterns through a microscope during the developing step. During the developing, changing test field patterns are formed because test field locations each had been exposed simultaneously to different radiation doses. These different doses are produced when radiation passes through a mask containing a plurality of different size radiation attenuators. When the changing test field pattern matches a known pattern, which is correlated to the desired development endpoint, the workpiece is removed from the developing step.
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Dellaguardia Ronald A.
Mauer, IV John L.
Seeger David E.
Cooney Jr. John M.
International Business Machines - Corporation
Kight III John
Percello Louis J.
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