Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1997-03-07
2000-12-26
McPherson, John A.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430325, 430326, 430921, 430925, G03F 7004, G03F 730
Patent
active
061656739
ABSTRACT:
The invention relates to a polymeric, radiation-sensitive resist composition comprising (i) iodonium sulfonate radiation sensitive acid generator; (ii) a polymer; and (iii) an acid labile compound.
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Allen Robert David
Breyta Gregory
DiPietro Richard Anthony
Hofer Donald Clifford
Ito Hiroshi
International Business Machines - Corporation
McPherson John A.
Reed Dianne E.
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