Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support
Patent
1997-04-14
1999-07-06
Picardat, Kevin M.
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Metallic housing or support
438118, 438119, 438121, 438124, H01L 2144, H01L 2148, H01L 2150
Patent
active
059207701
ABSTRACT:
Bonding pads are formed on a main surface of a semiconductor chip. An insulating layer having openings located on the bonding pads is formed on the main surface of the semiconductor chip. Base metal layers are formed on the bonding pads. A buffer coat film having a portion laid on a periphery of the base metal layer is formed on the insulating layer. Connection layers are formed on the base metal layers. First conductors are formed on the connection layers. A seal resin exposing only top surfaces of the first conductors is formed. Lumpish second conductors are formed on the top surfaces of the first conductor. Thereby, a resin seal semiconductor package can be made compact and it has improved electrical characteristics and high reliability.
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Baba Shinji
Matsuo Mitsuyasu
Matsushima Hironori
Nakao Shin
Yasunaga Masatoshi
Collins Deven
Mitsubishi Denki & Kabushiki Kaisha
Picardat Kevin M.
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