Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
2011-04-26
2011-04-26
Eley, Timothy V (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
By optical sensor
C451S008000, C451S288000
Reexamination Certificate
active
07931522
ABSTRACT:
A polishing system includes a platen having a top surface to receive a polishing pad, a recess in the top surface, and a cavity inside the platen spaced from the recess, a carrier head to hold a surface of a substrate against the polishing pad on the platen, a monitoring module located in the cavity, the monitoring module including a light source and a detector, an optical head removably mounted in the recess in the top surface platen, and an optical fiber having a proximate end coupled to the monitoring module and a distal end held by the optical head holding the distal end of the optical fiber in a position to direct light through a window in the polishing pad to the surface of the substrate and receive reflected light from the surface of the substrate.
REFERENCES:
patent: 5385612 (1995-01-01), Li
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5879626 (1999-03-01), Waterson et al.
patent: 6395130 (2002-05-01), Adams et al.
patent: 6488568 (2002-12-01), Treur et al.
patent: 6586337 (2003-07-01), Parikh
patent: 6599765 (2003-07-01), Boyd et al.
patent: 6618130 (2003-09-01), Chen
patent: 6645045 (2003-11-01), Ohkawa
patent: 6688945 (2004-02-01), Liu
patent: 6707540 (2004-03-01), Lehman et al.
patent: 6878039 (2005-04-01), Yang et al.
patent: 6916225 (2005-07-01), Sugiyama et al.
patent: 6922253 (2005-07-01), Moore
patent: 6942543 (2005-09-01), Kobayashi et al.
patent: 6953515 (2005-10-01), Boyd et al.
patent: 6991514 (2006-01-01), Meloni et al.
patent: 7169016 (2007-01-01), Barada et al.
patent: 7210980 (2007-05-01), Swedek et
patent: 7214122 (2007-05-01), Hirokawa et al.
patent: 7226339 (2007-06-01), Benvegnu et al.
patent: 7252575 (2007-08-01), Kobayashi et al.
patent: 2003/0020009 (2003-01-01), Sugiyama et al.
patent: 2004/0242121 (2004-12-01), Hirokawa et al.
patent: 2007/0218812 (2007-09-01), Benvegnu et al.
patent: 2008/0009227 (2008-01-01), Benvegnu et al.
patent: 1458673 (2003-11-01), None
patent: 1196182 (2005-04-01), None
patent: 2001-105308 (2001-04-01), None
Chinese First Office Action, Application No. 200810175050.8, dated Nov. 24, 2009, 11 pages.
Benvegnu Dominic J.
David Jeffrey Drue
Swedek Bogdan
Applied Materials Inc.
Eley Timothy V
Fish & Richardson P.C.
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