Regulating cylinder unit in a single-crystal pulling apparatus a

Details Regulating cylinder unit in a single-crystal pulling apparatus a Regulating cylinder unit in a single-crystal pulling apparatus a

1998-03-09

1999-07-27

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117218, C30B 3500

Patent

active

059284226

ABSTRACT:
Regulating cylinder unit is divided into three parts, a third regulating cylinder shaped essentially like a cylinder and installed on the protection cylinder; a first regulating cylinder and a second regulating cylinder which are shaped like reversed truncated cones with different diameters and are capable of engaging with the third regulating cylinder. In addition, the second and third regulating cylinders are brought together in a preset ordering, that is, a flange formed at the outer peripheral rim of the upper end of the second regulating cylinder is engaged with a stepped portion of the third regulating cylinder, and a flange formed at the outer peripheral rim of the upper end of the first regulating cylinder is engaged with a flange formed at the inner peripheral rim of the lower end of the second regulating cylinder.

REFERENCES:
patent: 5363796 (1994-11-01), Kobayashi et al.
patent: 5720810 (1998-02-01), Arai et al.
patent: 5853480 (1998-12-01), Kubota et al.

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