Chemistry: electrical and wave energy – Apparatus – Electrolytic
Patent
1992-08-25
1994-05-17
Niebling, John
Chemistry: electrical and wave energy
Apparatus
Electrolytic
204400, 204416, 2041531, G01N 2726
Patent
active
053125363
ABSTRACT:
An apparatus and method for a cleaning process control is disclosed. The apparatus includes two parallel plates of glass that have a plurality of shims positioned therebetween and a means for clamping these plates of glass firmly against the shims. A contaminant is positioned between the plates of glass and the apparatus is cleaned using a selected cleaning process. The apparatus can then be inspected to determine the effectiveness of a particular cleaning process by peering through the transparent glass plates to inspect for any remaining contaminant. The apparatus can then be cleaned more extensively and used again to check a different cleaning process.
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A Comparison of CFC Alternatives Assessment Programs, Colin Lea, Journal of SMT, Apr. 1992, pp. 4-15.
Maday Gene A.
Pai Deepak K.
Bell Bruce F.
Ceridian Corporation
Niebling John
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