Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-12-25
2007-12-25
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C359S649000, C359S754000, C359S763000
Reexamination Certificate
active
11085602
ABSTRACT:
A purely refractive projection objective suitable for immersion micro-lithography is designed as a single-waist system with five lens groups, in the case of which a first lens group with a negative refracting power, a second lens group with a positive refracting power, a third lens group with a negative refracting power, a fourth lens group with a positive refracting power and a fifth lens group with a positive refracting power are provided. The system aperture is in the region of maximum beam diameter between the fourth and the fifth lens group. Embodiments of projection objectives according to the invention achieve a very high numerical aperture of NA>1 in conjunction with a large image field, and are distinguished by a good optical correction state and moderate overall size. Pattern widths substantially below 100 nm can be resolved when immersion fluids are used between the projection objective and substrate in the case of operating wavelengths below 200 nm.
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English Translation of JP 10-303114 cited above.
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Rostalski Hans-Juergen
Ulrich Wilhelm
Carl Zeiss SMT AG
Mathews Alan
Sughrue & Mion, PLLC
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