Refractive projection objective for immersion lithography

Details Refractive projection objective for immersion lithography Refractive projection objective for immersion lithography

2005-05-10

2005-05-10

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C359S649000, C359S754000, C359S763000

Reexamination Certificate

active

06891596

ABSTRACT:
A purely refractive projection objective suitable for immersion micro-lithography is designed as a single-waist system with five lens groups, in the case of which a first lens group with a negative refracting power, a second lens group with a positive refracting power, a third lens group with a negative refracting power, a fourth lens group with a positive refracting power and a fifth lens group with a positive refracting power are provided. The system aperture is in the region of maximum beam diameter between the fourth and the fifth lens group. Embodiments of projection objectives according to the invention achieve a very high numerical aperture of NA>1 in conjunction with a large image field, and are distinguished by a good optical correction state and moderate overall size. Pattern widths substantially below 100 nm can be resolved when immersion fluids are used between the projection objective and substrate in the case of operating wavelengths below 200 nm.

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