Reflective scatterometer

Details Reflective scatterometer Reflective scatterometer

2011-01-04

2011-01-04

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Of light reflection

With diffusion

Reexamination Certificate

active

07864324

ABSTRACT:
A reflective scatterometer capable of measuring a sample is provided. The reflective scatterometer includes a paraboloid mirror, a light source, a first reflector, a second reflector and a detector. The paraboloid mirror has an optical axis and a parabolic surface, wherein the sample is disposed on the focal point of the parabolic surface and the normal direction of the sample is parallel with the optical axis. A collimated beam generated from the light source is reflected by the first reflector to the parabolic surface and then is reflected by the parabolic surface to the sample to form a first diffracted beam. The first diffracted beam is reflected by the parabolic surface to the second reflector and is then reflected by the second reflector to the detector.

REFERENCES:
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patent: 5912741 (1999-06-01), Carter et al.
patent: 6744505 (2004-06-01), Wang et al.
patent: 6768567 (2004-07-01), Naulleau
patent: 6987568 (2006-01-01), Dana
patent: 7292341 (2007-11-01), Brill et al.
patent: 7656519 (2010-02-01), Meeks et al.

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