Reflecting device for electromagnetic waves

Details Reflecting device for electromagnetic waves Reflecting device for electromagnetic waves

2006-07-18

2006-07-18

Dunn, Drew A. (Department: 2872)

Optical: systems and elements

Mirror

With support

C359S359000, C359S584000, C204S192340

Reexamination Certificate

active

07077533

ABSTRACT:
A device serves for reflecting electromagnetic waves, in particular in a length range less than 200 nm. It has a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrier. An intermediate layer made of a material which is formed such that its surface roughness is not significantly increased after beam processing methods is fitted between the mirror carrier and the reflective layer.

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