4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Jiro Toumatsu

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Backscattered electron detector for an electron beam apparatus

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Reflected electron detector and a scanning electron microscope d

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Profile ID: LFUS-PAI-P-905439

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