Reduction of deflection errors in E-beam recording

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging

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430 41, 430942, G03C 500, G03G 1300

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active

046686096

ABSTRACT:
In the recording for a mass memory system by means of a plurality of electrostatic electron beam charges on an insulator storage medium comprising a dielectric material having a maximum secondary electron emission coefficient (.delta..sub.max) greater than one as a surface layer disposed on a conductive support the process of recording the individual transmission of charges at three distinguishable energy levels which provide uncharged spots and alternating negative and positive electrostatic charges in the pixels of the dielectric layer which alternating charges are effected by employing a primary beam energy greater than the lowest energy and less than the highest energy at which the secondary electron emission coefficient (.delta.) is unity for a positive charge and employing a primary beam energy less than the lowest energy or greater than the highest energy at which .delta. is unity for a negative charge.

REFERENCES:
patent: 3867192 (1975-02-01), Hermans et al.
patent: 4135926 (1979-01-01), Belli
patent: 4281050 (1981-07-01), Buckley et al.
patent: 4410614 (1983-10-01), Lelental et al.

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