Recess gate-type semiconductor device and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S331000, C257S332000, C257S401000, C257S622000, C257SE29134, C257SE29135

Reexamination Certificate

active

07323746

ABSTRACT:
A recess gate-type semiconductor device includes a gate electrode having a recessed portion at least partially covering a recess trench in an active region, and source/drain regions disposed in the active region that are separated by the gate electrode. The recess trench is separated from sidewalls of a device isolation region in a first direction and contacts sidewalls of the device isolation region in a second direction. The width of the recess trench of the active region in the second direction may be greater than the width of the source/drain regions in the second direction, and the recessed portion of the gate electrode may have tabs protruding in the first direction at its corners. Therefore, the semiconductor device has excellent junction leakage current and excellent refresh characteristics.

REFERENCES:
patent: 5559350 (1996-09-01), Ozaki et al.
patent: 6144081 (2000-11-01), Hsu et al.
patent: 2004/0135176 (2004-07-01), Kim
patent: 58-027363 (1983-02-01), None
patent: 2001-185701 (2001-07-01), None
patent: 2002-0041583 (2002-06-01), None
patent: 2004-0013460 (2004-02-01), None
patent: 2005-0002074 (2005-01-01), None
English language abstract of Korean Publication No. 2002-0041583, Jun. 3, 2002.
English language abstract of Korean Publication No. 2004-0013460, Feb. 14, 2004.
English language abstract of Korean Publication No. 2005-0002074, Jan. 7, 2005.
English language abstract of Korean Publication No. 58-027363, Feb. 18, 2003.
English language abstract of Korean Publication No. 2001-185701, Jul. 6, 2001.

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