4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. By reaction with substrate

Christian M. Gronet

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Cooling chamber for a rapid thermal heating apparatus

Illumination – Light source and modifier – With ventilating – cooling or heat insulating means
Patent

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Depositing polysilicon films having improved uniformity and appa

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Patent

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Depositing polysilicon films having improved uniformity and...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Method and apparatus for insitu vapor generation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Method and apparatus for insitu vapor generation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Patent

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Profile ID: LFUS-PAI-P-321666

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