Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1997-01-13
1998-06-16
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219390, 219405, 392424, H05B 362, F27B 514, F27D 1102
Patent
active
057674868
ABSTRACT:
A rapid thermal heating apparatus including an evacuable chamber having a window, a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources are disposed outside of the chamber and positioned adjacent to the window. They have a central longitudinal axis that extends in a substantially perpendicular direction relative to the window. The reflectors direct radiant energy through the window to radiate predetermined regions of a backside surface of a substrate in the chamber. The reflectors extend along a major portion of the longitudinal axis of the radiant energy sources. The substrate sits on a support in the chamber, and a source of processing gas, including a gas inlet manifold, is provided for passing processing gas to a frontside surface of the substrate.
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Gibbons James F.
Gronet Christian M.
Applied Materials Inc.
Pelham J.
Walberg Teresa J.
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